ATM-1100K
FEATURES
- Lamination pressure on and the temperature of whole wafer surface are uniformed.
- DFR lamination roller temperature is precisely controlled.
- DFR lamination tension is uniformed (Non-tension lamination and tenting lamination
are available.)
- Corresponding to protective tape lamination for back-grind process
- Environment friendly design (long life consumable parts, minimizing film consumption etc.)
- Improved workability
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TAIKO® is a registered trademark of DISCO Corporation in Japan and other countries.