ATM-12000DR
FEATURES
- Full automatic mounter for processing 12-inch (300 mm) wafers.
- Mounting a wafer, and then removing protective tape.
- No damage due to lamination roller on ultra thin and no air bubbles because of adopting vacuum chamber.
- Operations for replacing tape and supplying frames are centralized on the back of the machine.
- FOUP carrier. (option)
- In-line docking with B/G device, etching and polishing devices.
- Taking out wafers from a coin stacker. (option)
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TAIKO® is a registered trademark of DISCO Corporation in Japan and other countries.