Introduction to Products

ATM-3000EF　

FEATURES

  • State-of-the-art design to maintain the integrigy of the lamination area and to achieve the best footprint.
  • Ergonomic design for optimum access to operator areas and service areas on the system
  • Tape stretch data control.
  • Ease of operation
  • FOUP option
  • AGV and OHT protocol option
  • Applicable to 8" and 12" dia-wafer
  • Heater roller and heater table are applicable

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TAIKO® is a registered trademark of DISCO Corporation in Japan and other countries.

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