Introduction to Products

Sapphire Substrate Mounter　ATM-8100 Series

FEATURES

  • Tape is attached to the substrate in a vacuum, enabling bubble-free application. In addition, as this is a pressure differential-based application method, there is no stress on the wafer.
  • The series also supports thin membrane φ3, 4, 5, 6 inch substrates with thin films of 100 m or less.
  • It also supports a function that reads wafer IDs and issues barcodes (option).
  • In addition, customized specifications can be created to meet client requests.

TAIKO® is a registered trademark of DISCO Corporation in Japan and other countries.

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