Since UV irradiation is performed with a large bar type lamp while moving the work, uniform irradiation is possible on the entire surface of the dicing tape.
The amount of ultraviolet light can be adjusted with a single touch by operating the touch panel. A measurement mode is provided to automatically adjust for insufficient light intensity due to lamp life.
The mounting in vacuum eliminates the generation of air bubbles and does not damage the wafer.
The UV lamp can be replaced from the front of the device, making the work easy.
It can also be used for irradiation in the chamber.